Fundamentals of Micro and Nanofabrication

3,000.00

Prof. Shankar Selvaraja

Prof. Sushobhan avasthi

IISc Bangalore

*Additional GST and optional Exam fee are applicable.

SKU: IISc Bangalore Category:

Description

ABOUT THE COURSE:
The course provides an in-depth understanding of top-down device fabrication. Focus is the unit processes typically used in micro & nanofabrication of devices. Both concepts and practical aspects are covered. Topics include crystal growth, doping, chemical vapor deposition, physical vapor deposition, photolithography, wet etching, dry etching, and packaging. The course is accessible to students from diverse backgrounds, such as materials, physics, chemistry, mechanical engineering, and electrical engineering.The course will be a derivative of NE203: Advanced Micro & Nano Fabrication Technology & Processes. Students from various departments outside CeNSE, e.g. Physics, Chemistry, ECE, DESE, IAP, routinely take the course.
INTENDED AUDIENCE : Masters students interested in fundamentals of top-down micro and nanodevice fabrication
PREREQUISITES : General background in physics, chemistry, materials, chemical engineering, mechanical engineering, or electronic engineering should be enough.
INDUSTRY SUPPORT : Electronic Device Manufacturing

ABOUT THE INSTRUCTOR

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Prof.Shankar Kumar Selvaraja obtained B.E. Electronics and Communication Engineering from Dr. MCET, Pollachi, Bharathiar University, M.E. Optical Communication from College of Engineering, Anna University, Chennai, M. S. Microelectronics and Microsystems from University of Twente, The Netherlands and Ph.D. in Photonics Engineering from Ghent University, Belgium in 2011. His doctoral thesis was carried out at imec (inter-university microelectronics center), Leuven, Belgium on wafer-scale fabrication technology for Silicon photonic integrated circuits. He was supported by Dehouse doctoral grant and scientific leadership training award to conduct his doctoral work. Between 2011 and 2014, he worked at imec, Belgium developing next-generation microprocessor for high-speed computing using Silicon photonic integrated circuits. He has spent a decade in the area of silicon photonic developing state-of-the-art process and device technology for Silicon Complementary-Metal-Oxide-Semiconductor (CMOS) compatible photonic integrated circuit for high-speed optical interconnect. Dr.Shankar Kumar Selvaraja joined Centre for Nano Science and Engineering at Indian Institute of Science (IISc) in 2014 as an Assistant Professor, where he is heading the Photonics Research Laboratory. He is currently deputy chairman of the National Nanofabrication Center at IISc. He was awarded Early Career Research Award by Department of Science and Technology-Science and Engineering Research Board (DST-SERB), Government of Indian. In 2014, he was awarded Sir Visvesvaraya Young Faculty Research Fellowship by Ministry of Electronics and Information Technology (MeitY), Government of India. He is a senior member of IEEE (Institute of Electrical and Electronics Engineers), Member of OSA (Optical Society of America) and SPIE. His current area of research includes high-speed Si photonics, Silicon Nitride photonics circuits, microwave photonics, and on-chip mic-IR sensing technology.

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Prof.Sushobhan has worked in the field of semiconductor device fabrication technology for more than 10 years, specializing on photovoltaics. His PhD thesis was on organic/Si heterojunction silicon solar cells. He then worked as a post-doctoral research associate in the Princeton Institute of Science and Technology of Materials (PRISM), where he worked on oxide/Si heterojunction solar cells. Since 2014, he has been working an assistant professor in the Indian Institute of Science at the Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc). In 2014, he was awarded Sir Visvesvaraya Young Faculty Research Fellowship by Ministry of Electronics and Information Technology (MeitY), Government of India. In 2018 he was awarded the Young Engineer Award by the Indian National Academy of Engineers (INAE). He is a young associate of the INAE, member of IEEE (Institute of Electrical and Electronics Engineers), and member of MRS. Sushobhans current research interests are thin-film photovoltaics, heterojunction solar cells, and metal-oxide electronics. He has authored over 30 research papers and holds a Taiwanese patent (US and European patent applications pending).Sushobhan is a member of the Administration Committee of the National Nanofabrication Facility at CeNSE. He is also a member of the Institute Safety Committee and Safety warden for CeNSE

Certification Process

1. Join the course
Learners may pay the applicable fees and enrol to a course on offer in the portal and get access to all of its contents including assignments. Validity of enrolment, which includes access to the videos and other learning material and attempting the assignments, will be mentioned on the course. Learner has to complete the assignments and get the minimum required marks to be eligible for the certification exam within this period.

COURSE ENROLMENT FEE: The Fee for Enrolment is Rs. 3000 + GST

2. Watch Videos+Submit Assignments
After enrolling, learners can watch lectures and learn and follow it up with attempting/answering the assignments given.

3. Get qualified to register for exams
A learner can earn a certificate in the self paced course only by appearing for the online remote proctored exam and to register for this, the learner should get minimum required marks in the assignments as given below:

CRITERIA TO GET A CERTIFICATE
Assignment score = Score more than 50% in at least 9/12 assignments.
Exam score = 50% of the proctored certification exam score out of 100
Only the e-certificate will be made available. Hard copies will not be dispatched.”

4. Register for exams
The certification exam is conducted online with remote proctoring. Once a learner has become eligible to register for the certification exam, they can choose a slot convenient to them from what is available and pay the exam fee. Schedule of available slot dates/timings for these remote-proctored online examinations will be published and made available to the learners.

EXAM FEE: The remote proctoring exam is optional for a fee of Rs.1500 + GST. An additional fee of Rs.1500 will apply for a non-standard time slot.

5. Results and Certification
After the exam, based on the certification criteria of the course, results will be declared and learners will be notified of the same. A link to download the e-certificate will be shared with learners who pass the certification exam.

CERTIFICATE TEMPLATE

Course Details

Week 1: Introduction to micro-fabrication
Week 2: Substrate
Week 3: Cleaning
Week 4: Additive processing: Doping
Week 5: Additive processing: Native Films
Week 6: Additive processing: CVD
Week 7: Additive processing: PVD
Week 8: Lithography 1
Week 9: Lithography 2
Week 10: Subtractive Process: Wet Etching
Week 11: Subtractive Process: Dry Etching
Week 12: CMP and Packaging

Books and references

1.The Science and Engineering of Microelectronic Fabrication by Stephen A.  Campbell
2.VLSI Fabrication Principles: Silicon and Gallium Arsenide by Sorab K. Gandhi
3.Introduction to Microelectronic Fabrication by Richard C. Jaeger
4.Materials Science of Thin Films by Milton Ohring
5.Fundamentals of Microfabrication and Nanotechnology, by Marc J. Madou
6.Fundamental Principles of Optical Lithography by Chris Mack
7.Electronic Materials by Prof. Dr. Helmut Föll

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